In 1982 an exceptionally solid composite of aluminium oxide and silicon carbide whiskers was found out. Progress of the laboratory-made composite to the industrial product took only three several years. CMP of single-crystal SiC was first reported by Zhou [22] in 1997. He observed that chemical reactions of CMP could https://www.facebook.com/permalink.php?story_fbid=pfbid02qy5RYwv9mRHSFYwncPbxRsdtEco9SbCfbnAheuxAs1drJAu8uwWJX23DPnghtnrcl&id=61560512640678&__cft__[0]=AZVECecDFdwp9WLUavNF_NqeonZijvhHENjG_jRXUkIllE4rZhtTITKA7DzRPFiCrjUDolI-fwlu6SlV1ZocBH1QSpBAIUaos6uRPM6WHrpvENB0AOmAeSmmRHi6IjeC61mKPY3WIjRCHG32rBXdK1FipgkW4L5HdVUDxJaypqhtJVInTZ65MpOC8-z_2ill-etiShQwY4Hz3k3jBopbGrBj&__tn__=%2CO%2CP-R